Influence of object structure on the accuracy of 3-D systems for metrology

Donald J. Svetkoff; Donald B.T. Kilgus

doi:10.1117/12.57990

1 March 1992 Influence of object structure on the accuracy of 3-D systems for metrology

Donald J. Svetkoff, Donald B.T. Kilgus

Proceedings Volume 1614, Optics, Illumination, and Image Sensing for Machine Vision VI; (1992) https://doi.org/10.1117/12.57990
Event: Robotics '91, 1991, Boston, MA, United States

Abstract

Progress in the development of 3D systems for inspection and measurement has resulted in new systems using several imaging techniques. Requirements for sub-pixel inspection accuracy are now common throughout the industry, mandating a thorough examination of sensor performance limits. The biggest challenge for any 3D system is accurate measurement of object location and height when the intrascene dynamic range is large. This paper examines several fundamental sources of error in 3D systems, particularly imaging errors found near object edges. The results are important for development of 3D metrology system specifications.

Citation Download Citation

Donald J. Svetkoff and Donald B.T. Kilgus "Influence of object structure on the accuracy of 3-D systems for metrology", Proc. SPIE 1614, Optics, Illumination, and Image Sensing for Machine Vision VI, (1 March 1992); https://doi.org/10.1117/12.57990

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