Monitoring vibrations in microelectronics facilities

John J. O'Sullivan

doi:10.1117/12.56850

1 February 1992 Monitoring vibrations in microelectronics facilities

John J. O'Sullivan

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56850
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

A PC based vibration monitoring system can be an effective tool for the prevention and diagnosis of vibration related problems in microelectronics facilities. The computing and storage power of present day PC''s, coupled with the availability of high speed data acquisition plug-in boards, allows for the creation of a powerful but low cost system. The low frequency content motion typical of buildings that support sensitive tools can be exploited by multiplexing multiple signals into a single A/D converter. By doing that, many channels of data can be monitored by a single PC without a proportional rise in system cost. Programmable A/D boards and multiplexers can be controlled by a user through the PC to provide flexibility in obtaining data samples. Once available to the PC, there is great flexibility to examine, modify, display and save data. The functions to control the system and handle the data can be integrated into a single program accessible to facility engineers. By separating the various monitoring functions into library of high level commands, a customized monitoring regimen can be assembled for each application. Commercially available software for managing and displaying data can greatly decrease development costs in the creation of such a system.

Citation Download Citation

John J. O'Sullivan "Monitoring vibrations in microelectronics facilities", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56850

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