High-performance wafer stage: simplification delivers performance

John F. Cameron; Jacqueline A. Seto; Lawrence A. Wise

doi:10.1117/12.130340

1 June 1992 High-performance wafer stage: simplification delivers performance

John F. Cameron, Jacqueline A. Seto, Lawrence A. Wise

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130340
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

A mechanically simple, high performance wafer stage is discussed in this paper, including detailed descriptions of the mechanical construction, laser gauging system, electrical configuration and servo control. This stage provides for simultaneous X, Y, and theta motion with an inherently rigid, monolithic platform propelled by Sawyer linear motors. The measurement of position, for closed loop control, is provided by four axes of interferometric laser gauging. Position control is accomplished with a power-efficient, robust, digital servo system. The enhanced wafer positioning precision capability of this stage offers accurate alignment in enhanced global alignment mode (EGA). Due to its low mass (weighing less than 18 lb.) the stage delivers optimal acceleration, velocity, and settling. The stage has been incorporated in a 1:1 photolithographic wafer stepper. Its simplistic design incorporates a minimum number of moving parts and provides high reliability and low maintenance. This stage offers significant productivity advantages as demonstrated by the throughput specifications and the stage settling data reported in this paper. Overlay data using this system operating in EGA mode is also included.

Citation Download Citation

John F. Cameron, Jacqueline A. Seto, and Lawrence A. Wise "High-performance wafer stage: simplification delivers performance", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130340

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available