Advancements in one-dimensional profiling with a long-trace profiler

Steven C. Irick; Wayne R. McKinney

doi:10.1117/12.132173

20 October 1992 Advancements in one-dimensional profiling with a long-trace profiler

Steven C. Irick, Wayne R. McKinney

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132173
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Over the last several years the long trace profiler (LTP) has been evolving into a sophisticated machine capable of measuring surface profiles of very long dimensions. This report explains improvements, both hardware and software, that have helped to achieve accuracies and ranges in surface profiling that have been unobtainable until now. A comparison made by measuring standard optical surfaces on other instruments corroborates these accuracies.

Citation Download Citation

Steven C. Irick and Wayne R. McKinney "Advancements in one-dimensional profiling with a long-trace profiler", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132173

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