Digital receiving mode of radial gratings and its receiving precision

Song Shen; Xiangqun Cao

doi:10.1117/12.132171

20 October 1992 Digital receiving mode of radial gratings and its receiving precision

Song Shen, Xiangqun Cao

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132171
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Based on Fourier optics and digital sampling theory, digital receiving mode is proposed and realized. The receiving precision formula under digital signal subdivision and digital phase- deriving are set up in this paper. The precision is analyzed and the comparison between digital and analog receiving mode is made. The phase error caused by dc level and amplitude shifting, the eccentricity of the radial gratings, etc., and their combination with dividing error of gratings are almost totally eliminated with digital receiving. The experiment on auto self- detection of radial gratings with digital receiving mode is demonstrated at the end of the paper as an example of the application of the theory.

Citation Download Citation

Song Shen and Xiangqun Cao "Digital receiving mode of radial gratings and its receiving precision", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132171

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