Measurement of large plane surface shape with interferometric aperture synthesis

Masashi Otsubo; Katsuyuki Okada; Jumpei Tsujiuchi

doi:10.1117/12.132152

20 October 1992 Measurement of large plane surface shape with interferometric aperture synthesis

Masashi Otsubo, Katsuyuki Okada, Jumpei Tsujiuchi

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132152
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

It is difficult to measure the optical surface shape of large area plane using interferometers. A part of the area of the sample is measured repeatedly by using a small aperture interferometer. The connection of the adjacent areas data is made with the aid of the least square method. This paper shows a method of connection of the measurement and shows some results of experiment.

Citation Download Citation

Masashi Otsubo, Katsuyuki Okada, and Jumpei Tsujiuchi "Measurement of large plane surface shape with interferometric aperture synthesis", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132152

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