Measurement of large-scale and high-precision optics using a noncontact form-measuring probe

Seiichiro Murai; Katsunobu Ueda; Shigeru Sakuta; Ken Ishikawa

doi:10.1117/12.132107

20 October 1992 Measurement of large-scale and high-precision optics using a noncontact form-measuring probe

Seiichiro Murai, Katsunobu Ueda, Shigeru Sakuta, Ken Ishikawa

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132107
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

As optica' tecimology has been improved in recent years, devekpment of large sca'e and high precision optics is atso required. For measuring these optics, a non-contact form measuring probe, with nanometer order reso'ution and a 10 pin measurement range, has been developed. The probe has been installed on the work tab'e of an ulira precision CNC machine whose X— and Z-axis tables are positioned by a laser interferometer system with 2.5 nm resolution. The probe has measured deviations between the ideal surface form and the machined surface form. By using this system, form accuracy of large sca'e workpieces, such as high precision mirrors over 300 mm diameter, could be measured with high accuracy better than 0.1 pin.

Citation Download Citation

Seiichiro Murai, Katsunobu Ueda, Shigeru Sakuta, and Ken Ishikawa "Measurement of large-scale and high-precision optics using a noncontact form-measuring probe", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132107

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