Super-smooth surface polishing on aspherical optics

Manabu Ando; Mahito Negishi; Masafumi Takimoto; Akinobu Deguchi; Nobuo Nakamura; Makoto Higomura; Hironori Yamamoto

doi:10.1117/12.132106

20 October 1992 Super-smooth surface polishing on aspherical optics

Manabu Ando, Mahito Negishi, Masafumi Takimoto, Akinobu Deguchi, Nobuo Nakamura, Makoto Higomura, Hironori Yamamoto

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132106
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

The study of microscopes for shortwave light such as X rays has made much progress in recent years. Accordingly, the demand for a super-smooth aspherical optical element is increasing. The purpose of this research is to achieve a 0.08 p m or less surface figure error (relative accuracy 1O),and a 0.2 nm rms or less surface roughness on freeform surface optical elements of 500 mm in diameter or more. In order to improve the degree of surface roughness, we used a local pitch polishing method that had a profile generation possibility. A surface roughness of less than O.O6nm rms was achieved in the end of 1990 using the fused silica. In order to improve figure accuracy and ripple, we developed the Canon Super Smooth Polisher (CSSP)(Fig.1) which corrects the figure error by an on-machine measurement and developed a profile generating algorithm by early 1991. In this paper, we describe the results of studies on super-smooth polishing methods and the evaluation results of the CSSP system.

Citation Download Citation

Manabu Ando, Mahito Negishi, Masafumi Takimoto, Akinobu Deguchi, Nobuo Nakamura, Makoto Higomura, and Hironori Yamamoto "Super-smooth surface polishing on aspherical optics", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132106

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