Thickness dependence of the optical constants of thin Pt, Au, and Rh films in the soft x-ray region

Mihiro Yanagihara; Takaumi Maehara; Masaki Yamamoto; Takeshi Namioka

doi:10.1117/12.132131

20 October 1992 Thickness dependence of the optical constants of thin Pt, Au, and Rh films in the soft x-ray region

Mihiro Yanagihara, Takaumi Maehara, Masaki Yamamoto, Takeshi Namioka

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132131
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

The optical constants, (delta) equals 1 - n and k, of very thin platinum, rhodium, and gold films have been determined from the reflectance data measured in the soft x-ray region of 60 - 900 eV. Five platinum films (63 - 153 angstroms in thickness), five rhodium films (53 - 124 angstroms), and nine gold films (49 - 270 angstroms) were prepared by ion-beam sputtering on BK7 glass substrates. A Debye-Waller factor was applied to the Fresnel reflectance to take into account the reflectance degradation due to the roughness in the surface and the interface in the least-squares curve fitting analysis. The optical constants determined for the platinum and rhodium films show little dependence on the film thickness, while those of the gold films show definite dependence in a thickness range of 70 - 120 angstroms.

Citation Download Citation

Mihiro Yanagihara, Takaumi Maehara, Masaki Yamamoto, and Takeshi Namioka "Thickness dependence of the optical constants of thin Pt, Au, and Rh films in the soft x-ray region", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132131

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available