Local laser-induced deposition of thin films

Vadim P. Veiko; A. I. Kaidanov; H. A. Kovachki; Elena A. Shakhno

doi:10.1117/12.58635

1 April 1992 Local laser-induced deposition of thin films

Vadim P. Veiko, A. I. Kaidanov, H. A. Kovachki, Elena A. Shakhno

Proceedings Volume 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces; (1992) https://doi.org/10.1117/12.58635
Event: LAMILADIS '91: International Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, 1991, Chernivsti, Ukraine

Abstract

Possible mechanisms of tearing off and transference of the film from the donor substrate (target) to the acceptor substrate as a result of a local laser action are considered. Thermal, gas-dynamic and hydrodynamic models for explanation of a number of effects observed at local laser film deposition are proposed. The range of technological parameters close to optimal ones is determined.

Citation Download Citation

Vadim P. Veiko, A. I. Kaidanov, H. A. Kovachki, and Elena A. Shakhno "Local laser-induced deposition of thin films", Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); https://doi.org/10.1117/12.58635

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