Paper
25 November 1992 Chemical composition of TiNxOy solar selective absorbers
J. Eitle, P. Oelhafen, Michel P. Lazarov, R. Sizmann
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Abstract
TiNxOy films were prepared by activated reactive evaporation (ARE) on copper to produce a tandem solar absorber exhibiting a low emissivity (epsilon) (250 degree(s)C) 2/PO2) gas pressure ratios, show that maximum (epsilon) is obtained when the ratio PN2/PO2 is held approximately equals eight. The chemical composition of these TiNxOy films was determined by x-ray photoelectron spectroscopy (XPS) and related to solar selective properties. The investigated samples consist of about 38 - 42 atomic % titanium, 35 - 37 at% oxygen and 21 - 23 at% nitrogen (bulk values), depending on preparation conditions. A depth profile indicates an oxygen enrichment at the surface, partially due to the exposure of the samples to atmosphere. After sputtering the photoelectron spectra show a marked peak at the TiO and TiN positions and a weaker one at the TiO2 position. Therefore, with regard to the known composition, the film is mainly a TiO(-N) compound with a small admixture of TiO2. The surface layer is almost entirely consisting of TiO2. Additionally, there might also be a small amount of TiC (3 at% carbon impurity was detected).
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Eitle, P. Oelhafen, Michel P. Lazarov, and R. Sizmann "Chemical composition of TiNxOy solar selective absorbers", Proc. SPIE 1727, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XI: Selective Materials, Concentrators and Reflectors, Transparent Insulation and Superwindows, (25 November 1992); https://doi.org/10.1117/12.130486
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Cited by 5 scholarly publications and 1 patent.
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KEYWORDS
Nitrogen

Oxygen

Sputter deposition

Reflectivity

Titanium

Metals

Tin

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