Surface-roughness measurements of SiC x-ray mirrors

Tomoya Uruga; Hitoshi Yamaoka; Etsuo Arakawa; Xiao-Min Tong; Masaru Matsuoka; Koujun Yamashita

doi:10.1117/12.140536

25 February 1993 Surface-roughness measurements of SiC x-ray mirrors

Tomoya Uruga, Hitoshi Yamaoka, Etsuo Arakawa, Xiao-Min Tong, Masaru Matsuoka, Koujun Yamashita

Proceedings Volume 1739, High Heat Flux Engineering; (1993) https://doi.org/10.1117/12.140536
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Our recent experimental and analytical results obtained so far for the surface roughness of the Pt-coated SiC flat mirrors are reviewed. Total reflectivity and angle resolved scattering (ARS) curves were measured using CuK(alpha) x ray for an 800 mm long mirror and three kinds of small mirrors having different surface roughness without heat load. The convolution analysis of ARS curves derived the power spectra of the surface waving of the mirror. The root mean square surface roughness calculated from the integral of the power spectrum is consistent with that estimated from the total reflectivity data. Also, the range of the surface wave number contributing the x-ray reflection was estimated and compared with that measured with the other types of experimental methods, heterodyne interferometer and scanning tunnel microscopy.

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Tomoya Uruga, Hitoshi Yamaoka, Etsuo Arakawa, Xiao-Min Tong, Masaru Matsuoka, and Koujun Yamashita "Surface-roughness measurements of SiC x-ray mirrors", Proc. SPIE 1739, High Heat Flux Engineering, (25 February 1993); https://doi.org/10.1117/12.140536

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KEYWORDS

Mirrors

Scattering

X-rays

Reflectivity

Surface roughness

Laser scattering

Autoregressive models

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