Paper
5 February 1993 Spatial and temporal phase-measurement techniques: a comparison of major error sources in one dimension
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Abstract
Spatial and temporal phase-measurement interferometry techniques are affected by a number of sources of error. This paper focuses on the influence of major error sources on the results of phase calculations using the most popular algorithms. These error sources include phase-shifter miscalibration for N-frame temporal methods and its equivalent of the wrong carrier frequency in N-point spatial techniques and detector nonlinearities. Other errors considered are detector nonlinearities and leakage in the Fourier-transform method. Computer simulations in one dimension with straight, equally spaced fringes reveal the character and magnitude of these errors.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joanna Schmit, Katherine Creath, and Malgorzata Kujawinska "Spatial and temporal phase-measurement techniques: a comparison of major error sources in one dimension", Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); https://doi.org/10.1117/12.140770
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Cited by 22 scholarly publications.
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KEYWORDS
Phase shifts

Sensors

Error analysis

Scanning probe microscopy

Fourier transforms

Interferometry

Phase measurement

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