Polishing of CVD diamond films with abrasive liquidjets: an exploratoryinvestigation

Mohamed Hashish; David Bothell

doi:10.1117/12.130780

20 November 1992 Polishing of CVD diamond films with abrasive liquidjets: an exploratoryinvestigation

Mohamed Hashish, David Bothell

Proceedings Volume 1759, Diamond Optics V; (1992) https://doi.org/10.1117/12.130780
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

An exploratory study was conducted to determine the feasibility of polishing CVD diamond films with abrasive-liquidjets. A nozzle system that produces a high-velocity radial flow (between nozzle and workpiece) with zero or near-zero impact angles was used for polishing tests. The abrasive particles are acted upon by hydrodynamic forces to effect polishing. The relatively high particle flow rates (10 g/s) and velocities (over 150 m/s) result in relatively high polishing rates. The inertial effect of the abrasive particles appears to contribute significantly to the material removal. A diamond film was polished from 3 to 1.3 microns at a rate of 2.7 micron/s/mm² using 600-mesh SiC abrasives.

Citation Download Citation

Mohamed Hashish and David Bothell "Polishing of CVD diamond films with abrasive liquidjets: an exploratoryinvestigation", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); https://doi.org/10.1117/12.130780

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