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Elastic scattering of light reflects an inhomogeneous interface between two media. Applied to surfaces the technique is sensitive to roughness levels in the sub-Angstrom region. This makes it an excellent tool for studying minute changes in the surface structure while processing materials. Examples are given of real-time total integrated scattering applied to stress analysis of metallization films and monitoring of thermal stability of silicides.
Kenichi Hibino
"Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B5 (23 July 1993); https://doi.org/10.1117/12.2308820
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Kenichi Hibino, "Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating," Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B5 (23 July 1993); https://doi.org/10.1117/12.2308820