Light scattering problems in confocal scanning microscopy

Colin J. R. Sheppard

doi:10.1117/12.192013

31 October 1994 Light-scattering problems in confocal scanning microscopy

Colin J. R. Sheppard

Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192013
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland

Abstract

Confocal imaging of rough surfaces is considered. The general principles apply not only to confocal systems but also to other interferometric systems using high aperture objectives or a broad band of illumination wavelengths. It is demonstrated that scattering by a rough surface can be described in terms of its 3D spectrum and the coherent transfer function of the imaging system. An effective transfer function for imaging of rough surfaces is developed, based on the Kirchhoff approximation. It is described how confocal imaging can be used for reconstruction of surface profiles in the Kirchhoff approximation.

Citation Download Citation

Colin J. R. Sheppard "Light-scattering problems in confocal scanning microscopy", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); https://doi.org/10.1117/12.192013

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available