High-precision molding of integrated optical structures

Luca G. Baraldi; Rino E. Kunz; Joachim Meissner

doi:10.1117/12.165703

15 December 1993 High-precision molding of integrated optical structures

Luca G. Baraldi, Rino E. Kunz, Joachim Meissner

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165703
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Various techniques for potential low-cost fabrication of integrated optical devices by hot embossing into polymers are presented. Their advantages and disadvantages concerning fabrication restrictions and thermal properties of final devices are discussed. For two polymers, the long-term dimensional stability of embossed microstructures is investigated. The results show the suitability of this promising low-cost replication technique for practical applications.

Citation Download Citation

Luca G. Baraldi, Rino E. Kunz, and Joachim Meissner "High-precision molding of integrated optical structures", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165703

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