Diode laser-induced pyrolytic decomposition of spin-coated organometallic thin films

Stephane Evoy; Marie-Helene Bernier; Patrick Desjardins; Ricardo Izquierdo; Michel Meunier; Edward Sacher

doi:10.1117/12.167543

1 February 1994 Diode laser-induced pyrolytic decomposition of spin-coated organometallic thin films

Stephane Evoy, Marie-Helene Bernier, Patrick Desjardins, Ricardo Izquierdo, Michel Meunier, Edward Sacher

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167543
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

We have developed a compact and reliable diode laser-based system for the direct writing of metals from thin organometallic films deposited onto polyimide and SiO₂ substrates. This system uses an AlGaAs diode laser array, emitting at (lambda) equals 796 nm with a maximum power of 1 W. A commercially available gold ink was spin-coated onto the substrate to form the precursor film. Direct writing was achieved by focusing the laser beam onto the film and by moving the substrate at speeds ranging from 10 to 15,000 micrometers /s. We deposited gold lines 2 - 12 micrometers wide onto SiO₂ and 13 - 17 micrometers wide onto polyimide; a thickness of 0.1 micrometers was evaluated by profilometry. Conductive deposits with resistivities of 30 (mu) (Omega) (DOT)cm were obtained on polyimide with good reproducibility at high writing speeds. The selective electroless plating of copper was achieved onto the gold lines deposited on SiO₂. However, prior annealing was necessary to obtain reproducible plating.

Citation Download Citation

Stephane Evoy, Marie-Helene Bernier, Patrick Desjardins, Ricardo Izquierdo, Michel Meunier, and Edward Sacher "Diode laser-induced pyrolytic decomposition of spin-coated organometallic thin films", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167543

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available