Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist

Michael T. Gale; Markus Rossi; Helmut Schuetz

doi:10.1117/12.167542

1 February 1994 Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist

Michael T. Gale, Markus Rossi, Helmut Schuetz

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167542
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

Progress in the fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist followed by replication into epoxy or polymer materials is described. The technology enables a wide range of micro-optical elements to be fabricated and replicated using Ni shims electroformed from the photoresist originals. Examples of fabricated micro- optical elements are described, including microlens arrays, Fresnel microlenses, kinoforms, and other continuous microrelief phase elements.

Citation Download Citation

Michael T. Gale, Markus Rossi, and Helmut Schuetz "Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167542

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