Measurement of polygon by laser point source interferometry

Zhiwen Yang

doi:10.1117/12.156296

22 September 1993 Measurement of polygon by laser point source interferometry

Zhiwen Yang

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156296
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

This paper deals with the measurementprinciple of angular and pyramidal errors of the polygon mirror with laser point source interferometry gives the formulas of goniometry and analyses the measuring accuracy. The results obtained show that the testing accuracy of this method is in the range of one half second of arc. Key words: polygon mirror point source interferometry.

Citation Download Citation

Zhiwen Yang "Measurement of polygon by laser point source interferometry", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156296

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