Filters and wavefront dividing beamsplitters for the near and mid infrared produced by micromachining techniques

J. Warren

doi:10.1117/12.2298613

30 August 1993 Filters and wavefront dividing beamsplitters for the near and mid infrared produced by micromachining techniques

J. Warren

Author Affiliations +

Proceedings Volume 2104, 18th International Conference on Infrared and Millimeter Waves; 210451 (1993) https://doi.org/10.1117/12.2298613
Event: 18th International Conference on Infrared and Millimeter Waves, 1993, Colchester, United Kingdom

Abstract

Band pass filters for the far infrared have been produced by etching crosses into metal films onMylar substrates1,2. Unsupported thin cross shaped filters for the far infrared have been producedby etching crosses into 4 microns thick nickel foils3. These authors studied the dependence of thewavelength of peak transmission, bandwidth, and percentage of peak transmission on the shape ofthe crosses. Very accurately shaped crosses in thick metals for the mid infrared have beenproduced using LIGA4 . These filters showed a strong side peak and transmission in the 70% to80% range. Theoretical calculations by Compton et al5 for thin filters predict such a side peak,depending on the shape of the cross, and 100% transmission. To obtain maximum transmission forband pass filters, a tripod shape was used6 instead of the cross. These filters showed 100%transmission and the side peak for a thickness of 10.5 microns. The side peak is getting smaller forthinner filters.

Citation Download Citation

J. Warren "Filters and wavefront dividing beamsplitters for the near and mid infrared produced by micromachining techniques", Proc. SPIE 2104, 18th International Conference on Infrared and Millimeter Waves, 210451 (30 August 1993); https://doi.org/10.1117/12.2298613

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