Processing of HTcS antenna microbolometers

Sergei A. Zhgoon; Valery Georgievic Yakunin; Vladimir A. Ananchenko; Jacques Joffrin; Jean-Yves Prieur

doi:10.1117/12.176144

20 May 1994 Processing of high-T_c superconducting antenna microbolometers

Sergei A. Zhgoon, Valery Georgievic Yakunin, Vladimir A. Ananchenko, Jacques Joffrin, Jean-Yves Prieur

Proceedings Volume 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric; (1994) https://doi.org/10.1117/12.176144
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Dry and wet photolithography has been used to define metal elements with YBCO thin film microbolometers. I-NaI concentrated solution was found suitable to etch gold layouts on the top of YBCO layer without noticeable reaction. The wet and dry processes were found to give comparable devices performances, while the wet process is easier to reproduce.

Citation Download Citation

Sergei A. Zhgoon, Valery Georgievic Yakunin, Vladimir A. Ananchenko, Jacques Joffrin, and Jean-Yves Prieur "Processing of high-T_c superconducting antenna microbolometers", Proc. SPIE 2159, High-Temperature Superconducting Detectors: Bolometric and Nonbolometric, (20 May 1994); https://doi.org/10.1117/12.176144

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