Neon dense plasma focus point x-ray source for <=0.25 um lithography

Rahul R. Prasad; Mahadevan Krishnan; Joseph Mangano; Philip A. Greene; Niansheng Qi

doi:10.1117/12.175797

13 May 1994 Neon dense plasma focus point x-ray source for ≤ 0.25 um lithography

Rahul R. Prasad, Mahadevan Krishnan, Joseph Mangano, Philip A. Greene, Niansheng Qi

Proceedings Volume 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV; (1994) https://doi.org/10.1117/12.175797
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

A discharge driven, dense plasma focus (DPF) in Neon has been developed at SRL as a point x-ray source for sub-micron lithography. This source is presently capable of delivering approximately 25 J/pulse of Neon K-shell x rays (8 - 14 angstrom) into 4 (pi) steradians with an approximately equals 1.4% wall plug efficiency at a 20 Hz repetition rate. This corresponds to 500 W of average x-ray power. The discharge is produced by a capacitor bank circuit (8 kV, 1.8 kJ) that drives approximately equals 320 kA currents into the DPF load, with approximately equals 1 microsecond(s) rise-times. X rays are produced when a dense pinch of Neon is formed along the axis of the DPF electrodes. Four X ten⁵ discharges using a cooled DPF head have been fired producing x rays. The variation in the measured x-ray output, over several 10⁴ shots, corresponds to a variation in the dose delivered to a resist 40 cm from the source, of less than 1%. Data showing the measurement of the x-ray output, size, dose delivered to a resist, spectra of the source output, novel beam line concepts, and potential lithographic applications are discussed.

Citation Download Citation

Rahul R. Prasad, Mahadevan Krishnan, Joseph Mangano, Philip A. Greene, and Niansheng Qi "Neon dense plasma focus point x-ray source for ≤ 0.25 um lithography", Proc. SPIE 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV, (13 May 1994); https://doi.org/10.1117/12.175797

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