Effect of gas composition and purity on excimer laser operation

J. Gabzdyl; I. J. Stares; D. Yates; Michael R. Osborne; Michael A. O'Key

doi:10.1117/12.184634

16 August 1994 Effect of gas composition and purity on excimer laser operation

J. Gabzdyl, I. J. Stares, D. Yates, Michael R. Osborne, Michael A. O'Key

Proceedings Volume 2206, High-Power Gas and Solid State Lasers; (1994) https://doi.org/10.1117/12.184634
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

This paper reports a systematic evaluation of the effects of a wide range of gaseous contaminants introduced in the lasing gas on initial laser power and on gas fill lifetimes. The impurities studied and their relative concentrations were chosen on the basis of the probability of their occurrence in the lasing gases. These were assessed individually and also in common combinations, such as N₂/O₂ simulating an atmospheric leak. Investigations into using novel buffer gas mixtures have shown that increases in operating efficiencies can be achieved. This has been correlated with lasing gas analysis, which has revealed that the rate of internal impurity generation is dependent on the buffer gas composition.

Citation Download Citation

J. Gabzdyl, I. J. Stares, D. Yates, Michael R. Osborne, and Michael A. O'Key "Effect of gas composition and purity on excimer laser operation", Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); https://doi.org/10.1117/12.184634

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available