Electrostatically suspended and sensed micromechanical rate gyroscope

Richard P. Torti; Vijay Gondhalekar; Hieu Tran; B. Selfors; S. Bart; B. Maxwell

doi:10.1117/12.179613

13 July 1994 Electrostatically suspended and sensed micromechanical rate gyroscope

Richard P. Torti, Vijay Gondhalekar, Hieu Tran, B. Selfors, S. Bart, B. Maxwell

Proceedings Volume 2220, Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles; (1994) https://doi.org/10.1117/12.179613
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

Currently under development at SatCon Technology Co. is a proof of principle, angular rate sensing gyroscope which operates with a closed loop, electrostatic suspension. The prototype design will utilize an ohmically isolated rotor disc driven by multi-phase radial torque actuation. The rotor will be suspended radially and axially by fields produced from appropriately placed electrode elements. Angular rate will be detected as rebalanced rotor tilt. The inclusion of shared function electrodes for the sensors and actuators will minimize VLSI micro-machining complexity. To reduce stray capacitance, sensor FET guard driver circuitry will be placed close to the VLSI structure by means of hybridized construction. Operation of key subsystems such as rebalance/rotation sensors and the electrostatic actuators will be evaluated before the prototype geometry is fixed with the aid of limited function micromachined structures. A set of these preliminary structures has recently been received after fabrication at MCNC. The structures have been examined and appear to fit our geometric and electrical specifications. Testing with electronics is underway. Results of these evaluations and the updated prototype structure designs are discussed.

Citation Download Citation

Richard P. Torti, Vijay Gondhalekar, Hieu Tran, B. Selfors, S. Bart, and B. Maxwell "Electrostatically suspended and sensed micromechanical rate gyroscope", Proc. SPIE 2220, Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles, (13 July 1994); https://doi.org/10.1117/12.179613

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available