Influence of defect shape on laser-induced damage in multilayer coatings

Mark R. Kozlowski; Robert J. Tench; Robert Chow; Lynn Matthew Sheehan

doi:10.1117/12.192151

4 November 1994 Influence of defect shape on laser-induced damage in multilayer coatings

Mark R. Kozlowski, Robert J. Tench, Robert Chow, Lynn Matthew Sheehan

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192151
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Atomic force microscopy (AFM) was used as a diagnostic for laser damage testing of micrometers -scale nodule defects in e-beam deposited HfO₂/SiO₂ multilayer mirror coatings. Earlier experiments in our laboratory showed a significant increase in damage susceptibility for defects with heights greater than 0.6 micrometers . In the present study, e-bean HfO₂/SiO₂R coatings from two additional vendors were also studied. Atomic force microscopy characterization of the defects showed that the defect shape became less 'classic' as the defect dimensions, especially height, increased. The characteristic shapes (spatter, multilobe, etc.) of the larger defects also varied between vendors. Using the AFM and optical microscopy, laser damage experiments (1064-nm, 3-ns pulses) were performed on various defects found in the coatings of the two new vendors. The data showed once again that the damage susceptibility increased as the height of the defect increased. There was also some difference between vendors in the damage susceptibility of the defects of a given size. Spatter defects, found predominantly in the coatings of one vendor, showed the highest susceptibility to damage.

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Mark R. Kozlowski, Robert J. Tench, Robert Chow, and Lynn Matthew Sheehan "Influence of defect shape on laser-induced damage in multilayer coatings", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192151

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