Mass flux response comparisons of a 200-MHz surface acoustic wave (SAW) resonator microbalance to a 15-MHz thermoelectric quartz crystal microbalance (TQCM) in a high-vacuum environment

Donald A. Wallace; William D. Bowers

doi:10.1117/12.190148

19 October 1994 Mass flux response comparisons of a 200-MHz surface acoustic wave (SAW) resonator microbalance to a 15-MHz thermoelectric quartz crystal microbalance (TQCM) in a high-vacuum environment

Donald A. Wallace, William D. Bowers

Author Affiliations +

Proceedings Volume 2261, Optical System Contamination: Effects, Measurements, and Control IV; (1994) https://doi.org/10.1117/12.190148
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Using a 200 MHz Surface Acoustic Wave (SAW) resonator device as a high-vacuum molecular deposition microbalance, similar to a bulk quartz crystal microbalance (QCM), and an often-used 15 MHz thermoelectric QCM (TQCM), a comparison of various parameters was made during a high-vacuum outgassing experiment. The source of molecular outgassing was a bright aluminum foil which was cooled to liquid nitrogen temperature and alternately, to ambient temperature. The two sensors, the SAW QCM and the TQCM were placed next to each other and viewed only the aluminum foil. In this high-vacuum environment, a comparison between various parameters, i.e., mass sensitivity, long term drift rate, stability, thermal effects and dynamic range of the SAW and the TQCM, was obtained.

Citation Download Citation

Donald A. Wallace and William D. Bowers "Mass flux response comparisons of a 200-MHz surface acoustic wave (SAW) resonator microbalance to a 15-MHz thermoelectric quartz crystal microbalance (TQCM) in a high-vacuum environment", Proc. SPIE 2261, Optical System Contamination: Effects, Measurements, and Control IV, (19 October 1994); https://doi.org/10.1117/12.190148

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