Low-cost uncooled ferroelectric detector

Howard R. Beratan; Charles M. Hanson; Edward G. Meissner

doi:10.1117/12.189240

7 October 1994 Low-cost uncooled ferroelectric detector

Howard R. Beratan, Charles M. Hanson, Edward G. Meissner

Proceedings Volume 2274, Infrared Detectors: State of the Art II; (1994) https://doi.org/10.1117/12.189240
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Texas Instruments has developed a low-cost, manufacturable uncooled IR focal plane array detector technology. A detector array comprises 245 X 328 pixels on 48.5 micrometers centers. Operating near ambient room temperature, ferroelectric Barium Strontium Titanate (BST) pixels hybridized with a Si read-out integrated circuit consistently yield devices with system noise equivalent temperature difference less than 0.08 K with f/l optics. The fabrication process for forming these arrays is 95 percent compatible with standard Si processes. Detector process commonality with a Si wafer processing format is maintained by fabricating 100 mm diameter ceramic BST wafers with excellent dielectric properties. Highly dense, sintered ceramic BST offers cost and performance advantages not found in single crystal materials. This detector scheme provides forward-looking infrared technology for many applications where cost, weight, power, reliability, and size are important design considerations. Typical applications are surveillance devices, fire control sights for man- portable weapons, and vehicle driver's aids.

Citation Download Citation

Howard R. Beratan, Charles M. Hanson, and Edward G. Meissner "Low-cost uncooled ferroelectric detector", Proc. SPIE 2274, Infrared Detectors: State of the Art II, (7 October 1994); https://doi.org/10.1117/12.189240

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