Study of soft x-ray multilayer thin film

Zhengxiu Fan; Jian-Da Shao; Kui Yi; Gongjie Yin; Lixiang Yuan

doi:10.1117/12.190753

26 October 1994 Study of soft x-ray multilayer thin film

Zhengxiu Fan, Jian-Da Shao, Kui Yi, Gongjie Yin, Lixiang Yuan

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190753
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

In this paper, normal incidence soft x-ray multilayer mirrors for 23.4 nm, 8.89 nm, and 4.47 nm have been fabricated by planar magnetron, the multilayer is characterized with low angle x-ray diffraction and TEM technique. The absolute reflectivity is measured at the synchronization radiation facility.

Citation Download Citation

Zhengxiu Fan, Jian-Da Shao, Kui Yi, Gongjie Yin, and Lixiang Yuan "Study of soft x-ray multilayer thin film", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190753

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