Highly damage resistant cavity optics for excimer lasers

Nikolay V. Morozov; Spartak I. Sagitov; V. S. Barabanov

doi:10.1117/12.213746

14 July 1995 Highly damage resistant cavity optics for excimer lasers

Nikolay V. Morozov, Spartak I. Sagitov, V. S. Barabanov

Proceedings Volume 2428, Laser-Induced Damage in Optical Materials: 1994; (1995) https://doi.org/10.1117/12.213746
Event: Laser-Induced Damage in Optical Materials: 1994, 1994, Boulder, CO, United States

Abstract

This paper reviews the experimental works dedicated to the development of mirrors and antireflection coatings for the UV spectrum range carried out in the Quantum Radiophysics Division of P.N. Lebedev Physical Institute, Russian Academy of Sciences. The methods of obtaining the single-layer and multilayer optical coatings are given. The effect of the optical coating construction as well as various technological factors of coating process on damage threshold and chemical stability of mirrors is investigated.

Citation Download Citation

Nikolay V. Morozov, Spartak I. Sagitov, and V. S. Barabanov "Highly damage resistant cavity optics for excimer lasers", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213746

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