Broadband UV small-spot spectroscopic ellipsometer

Timothy R. Piwonka-Corle; Torsten R. Kaack; K. F. Scoffone; Xing Chen; K. B. Malwankar; Mark E. Keefer; Lloyd J. LaComb Jr.; Jean-Louis P. Stehle; Jean-Philippe Piel; Dorian Zahorski; O. Thomas; Jean Pierre Rey; L. Escadafals

doi:10.1117/12.209239

22 May 1995 Broadband UV small-spot spectroscopic ellipsometer

Timothy R. Piwonka-Corle, Torsten R. Kaack, K. F. Scoffone, Xing Chen, K. B. Malwankar, Mark E. Keefer, Lloyd J. LaComb Jr., Jean-Louis P. Stehle, Jean-Philippe Piel, Dorian Zahorski, O. Thomas, Jean Pierre Rey, L. Escadafals

Author Affiliations +

Proceedings Volume 2439, Integrated Circuit Metrology, Inspection, and Process Control IX; (1995) https://doi.org/10.1117/12.209239
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix® UV125OSE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO on silicon, and Si3N4 on silicon, and a multiple layer stack of SiO Ipoly-SiISiOon silicon. Keywords: spectroscopic ellipsometry, ultra-violet, thin films, measurements, index of refraction, silicon dioxide, silicon nitride, polysilicon

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Timothy R. Piwonka-Corle, Torsten R. Kaack, K. F. Scoffone, Xing Chen, K. B. Malwankar, Mark E. Keefer, Lloyd J. LaComb Jr., Jean-Louis P. Stehle, Jean-Philippe Piel, Dorian Zahorski, O. Thomas, Jean Pierre Rey, and L. Escadafals "Broadband UV small-spot spectroscopic ellipsometer", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); https://doi.org/10.1117/12.209239

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