Laser-assisted deposition of TiN and TiC coatings

O. Conde; M. L.F. Parames; A. J. Silvestre

doi:10.1117/12.203521

8 March 1995 Laser-assisted deposition of TiN and TiC coatings

O. Conde, M. L.F. Parames, A. J. Silvestre

Proceedings Volume 2461, ROMOPTO '94: Fourth Conference in Optics; (1995) https://doi.org/10.1117/12.203521
Event: ROMOPTO '94: 4th Conference on Optics, 1994, Bucharest, Romania

Abstract

In this paper we present results on the deposition of titanium nitride and titanium carbide films by pyrolytic laser-induced chemical vapor deposition using a cw TEM₀₀ CO₂ laser beam. TiN lines were deposited onto mild steel substrates while TiC spots were deposited on silica substrates. The microstructure of the surface and of fractured cross-sections of the films were examined by scanning electron microscopy. The topography of the films and the thickness measurements were studied both with diamond-stylus and non-contact laser profilometers. The chemical composition of the TiN films was investigated by electron probe microanalysis. X-ray diffraction was used for phase and structure analyses of the TiC films.

Citation Download Citation

O. Conde, M. L.F. Parames, and A. J. Silvestre "Laser-assisted deposition of TiN and TiC coatings", Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); https://doi.org/10.1117/12.203521

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