Processing parameters influence on structural properties of PZT layers deposited by pulsed laser deposition (PLD)

V. Trtik; Miroslav Jelinek; Lubomir Jastrabik

doi:10.1117/12.203611

1 March 1995 Processing parameters influence on structural properties of PZT layers deposited by pulsed laser deposition (PLD)

V. Trtik, Miroslav Jelinek, Lubomir Jastrabik

Author Affiliations +

Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203611
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany

Abstract

Ferroelectric thin film of Pb(Zr_0.48Ti_0.52)O₃ (PZT) was deposited on lattice mismatched (0001)sapphire for substrate temperatures T_g in the region from 470 to 590 degree(s)C and oxygen pressure of 200 and 900 mTorr. Structural properties were characterized by XRD. Improvement of XRD patterns of deposited films with post-annealing temperature of the furnace was studied. The development of the plasma plume shape from PZT target under changing deposition conditions was investigated by CCD camera. Results show strong dependence of plume shape with oxygen pressure and laser beam spot size.

Citation Download Citation

V. Trtik, Miroslav Jelinek, and Lubomir Jastrabik "Processing parameters influence on structural properties of PZT layers deposited by pulsed laser deposition (PLD)", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); https://doi.org/10.1117/12.203611

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