Fully automated mask/reticle production factory

Osamu Tsubakida; T. Ban; T. Kojima; Akira Morishige; T. Yoshizawa

doi:10.1117/12.212809

3 July 1995 Fully automated mask/reticle production factory

Osamu Tsubakida, T. Ban, T. Kojima, Akira Morishige, T. Yoshizawa

Proceedings Volume 2512, Photomask and X-Ray Mask Technology II; (1995) https://doi.org/10.1117/12.212809
Event: Photomask Japan 1995, 1995, Kanagawa, Japan

Abstract

Recently, very importance has been placed on the quality, delivery, and production cost of masks/reticles as factors relating to the fabrication of high-density devices. These factors have a significant bearing on the success in the device business. In addition, quality requirements for masks/reticles are becoming more and more tightening. To fulfill these requirements, it has been considered necessary to automate production processes. Automation of mask/reticle production has been difficult because the market is small and the development of such automation has been expensive. Therefore, it has been recognized that old-type mask/reticle factories must be turned into automated factories at inexpensively and efficiently.

Citation Download Citation

Osamu Tsubakida, T. Ban, T. Kojima, Akira Morishige, and T. Yoshizawa "Fully automated mask/reticle production factory", Proc. SPIE 2512, Photomask and X-Ray Mask Technology II, (3 July 1995); https://doi.org/10.1117/12.212809

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