High-speed mask EB graphical image browser

Robert Veltman; Itsuji Ashida; Kunihiko Tsuboi

doi:10.1117/12.212791

3 July 1995 High-speed mask EB graphical image browser

Robert Veltman, Itsuji Ashida, Kunihiko Tsuboi

Proceedings Volume 2512, Photomask and X-Ray Mask Technology II; (1995) https://doi.org/10.1117/12.212791
Event: Photomask Japan 1995, 1995, Kanagawa, Japan

Abstract

With mask data processing becoming increasingly complex, there is a growing need for mask data verification. An EB graphical image browser was developed to support mask data verification and was designed to allow high speed visualization of large data volumes such as typically found in ULSI designs. The EB browser uses an intermediate format in order to support multiple EB data formats. The software implementation allows for portability between computer platforms commonly used in a CAD framework.

Citation Download Citation

Robert Veltman, Itsuji Ashida, and Kunihiko Tsuboi "High-speed mask EB graphical image browser", Proc. SPIE 2512, Photomask and X-Ray Mask Technology II, (3 July 1995); https://doi.org/10.1117/12.212791

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