Simulation software BEAMISH for the design of charged-particle optical instruments

Yoshihiro Ueno; Masahiro Takebe; Akihiko Iwata; Sumio Kumashiro

doi:10.1117/12.221568

25 September 1995 Simulation software BEAMISH for the design of charged-particle optical instruments

Yoshihiro Ueno, Masahiro Takebe, Akihiko Iwata, Sumio Kumashiro

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221568
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The versatile software package BEAMISH has been developed for the design and optimization of charged particle optical instruments. It is possible to pre- and detailed design using this software. There are five distinct features in this software, namely: (1) the optical properties of the same one instrument are calculated by plural computational methods; (2) it is easy to get hold of the optical properties of the instrument by using the various graphical representations; (3) the optimization design can be carried out automatically by the computer; (4) using the Monte Carlo simulation and 3D analysis; it is able to simulate the optical instrument as very real as possible; (5) the optical database is used for the arrangement of computed electromagnetic fields. To realize foregoing distinct features this software package includes the following sub-programs; (a) computations or real or model electromagnetic fields; (b) raytracing and aberration calculations for estimating the optical properties of the instruments; (c) optimization program to minimize the merit functions of the instruments; (d) optical database and its handling programs; (e) graphical interfaces of various computational results and optical properties. In this paper the outline of this software is described and an example (the analysis of Pierce 5B type electron gun) is shown.

Citation Download Citation

Yoshihiro Ueno, Masahiro Takebe, Akihiko Iwata, and Sumio Kumashiro "Simulation software BEAMISH for the design of charged-particle optical instruments", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221568

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