Use of two focusing modes on two-lens focused ion-beam column

Tohru Ishitani; Y. Kawanami

doi:10.1117/12.221592

25 September 1995 Use of two focusing modes on two-lens focused ion-beam column

Tohru Ishitani, Y. Kawanami

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221592
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

On focused ion beam (FIB) milling there is a demand for FIBs of high current densities in wide diameter range for high-speed milling with good positional accuracy. There is also a demand for extremely fine FIBs to form scanning ion microscope images with high resolution. Coarse guidelines in designing the two-lens FIB column are obtained from a locus of the characteristic point on beam diameter vs. beam current (d - Ip) curve in logarithmic scale. Here, the characteristic point is the intersection of two lines corresponding to d equals the Gaussian beam spot and d equals the chromatic aberration's spot. The coarse design shows that two focusing modes on the two-lens column is answerable to their demands. The representative FIB specifications of two focusing modes are also described.

Citation Download Citation

Tohru Ishitani and Y. Kawanami "Use of two focusing modes on two-lens focused ion-beam column", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221592

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