Simplified rule generation for automated rules-based optical enhancement

Oberdan W. Otto; Joseph G. Garofalo; Richard C. Henderson

doi:10.1117/12.228212

8 December 1995 Simplified rule generation for automated rules-based optical enhancement

Oberdan W. Otto, Joseph G. Garofalo, Richard C. Henderson

Proceedings Volume 2621, 15th Annual BACUS Symposium on Photomask Technology and Management; (1995) https://doi.org/10.1117/12.228212
Event: 15th Annual BACUS Symposium on Photomask Technology and Management '95, 1995, Santa Clara, CA, United States

Abstract

This paper demonstrates a new methodology called parametric anchoring in which a small number of representative line-space measurements are used to match a given lithographic process to computational models for a rule-based optical enhancement scheme. The rule generation program, SimRule^TM, which incorporates the models, is used to create the rule lookup tables which are in turn used by the rules-based correction program, OPRX^TM. Parametric anchoring is performed before the rule tables are computed, as distinguished from the earlier anchoring approach in which the multi-dimensional rule tables are reshaped to match a number of measured points. Parametric anchoring uses line and space measurements which are familiar to process engineers.

Citation Download Citation

Oberdan W. Otto, Joseph G. Garofalo, and Richard C. Henderson "Simplified rule generation for automated rules-based optical enhancement", Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); https://doi.org/10.1117/12.228212

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