Recent trends in silicon micromachining technology

John H. Jerman

doi:10.1117/12.220930

13 September 1995 Recent trends in silicon micromachining technology

John H. Jerman

Proceedings Volume 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications; (1995) https://doi.org/10.1117/12.220930
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

The rapid expansion in number and scope of research projects in the general area of micromachining technology makes the field especially interesting. Advances, particularly from universities and research institutes, suggest that increased commercial development is likely in a number of new fields. The nature of the fabrication technologies used to make these prototype parts, however, lead to difficulties in quickly reaping commercial benefits from these technolgoical advancements. This is in contrast to the nature of commercial development in the integrated circuit industry, where standardized processes result in rapid development of systems and products which use new designs.

Citation Download Citation

John H. Jerman "Recent trends in silicon micromachining technology", Proc. SPIE 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, (13 September 1995); https://doi.org/10.1117/12.220930

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