Extremely narrow-bandwidth high-repetition-rate laser for high-NA step-and-scan tools

Juergen Kleinschmidt; Rainer Paetzel; Peter Heist; Uwe Stamm; Dirk Basting; Michael W. Powell

doi:10.1117/12.240944

7 June 1996 Extremely narrow-bandwidth high-repetition-rate laser for high-NA step-and-scan tools

Juergen Kleinschmidt, Rainer Paetzel, Peter Heist, Uwe Stamm, Dirk Basting, Michael W. Powell

Proceedings Volume 2726, Optical Microlithography IX; (1996) https://doi.org/10.1117/12.240944
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

In this paper we discuss several resonator designs in terms of bandwidth, efficiency and lifetime of the major optical components. Experimental data are presented for a resonator combining the advantages of a long lifetime grating and etalon elements. Moreover, the limitations of these elements are overcome through the outcoupling scheme, ensuring optimum feedback over gas and tube lifetimes. In addition to low cost-of-ownership, this same resonator provides for an extremely narrow bandwidth ArF excimer laser development, using a single oscillator.

Citation Download Citation

Juergen Kleinschmidt, Rainer Paetzel, Peter Heist, Uwe Stamm, Dirk Basting, and Michael W. Powell "Extremely narrow-bandwidth high-repetition-rate laser for high-NA step-and-scan tools", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); https://doi.org/10.1117/12.240944

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