A calibration method of the system error used for CCD MTF measurement

Changyuan Han

doi:10.1117/12.2298960

1 September 1996 A calibration method of the system error used for CCD MTF measurement

Changyuan Han

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 277826 (1996) https://doi.org/10.1117/12.2298960
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A specific equipment for testing the CCDs has been built in our institute. The schematic diagram is shown in Fig. 1 . A 40A microscope objective with long working distance of 2.5mm is used for observing and adjusting the array elements of the undertest CCD. The CCD and its driving circuits are mounted in a CCD box that is fixed on the table which can be adjusted precisely on five dimensions. Along the CCD array direction the table can move about 100mm. The precision slide used for this displacement has the straightness of 1 arc second. The distance of the displacement is measured by a heterodyne laser interferometer with the accuracy of 0.1Ã‚Âµm.

Citation Download Citation

Changyuan Han "A calibration method of the system error used for CCD MTF measurement", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 277826 (1 September 1996); https://doi.org/10.1117/12.2298960

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