Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory

Eric W. Rogala

doi:10.1117/12.2298968

1 September 1996 Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory

Eric W. Rogala

Author Affiliations +

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27782E (1996) https://doi.org/10.1117/12.2298968
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A novel interferometer based upon a conventional phase-shifting design is presented. The aim is to introduce the capability of measuring both the surface profile and the complex index of refraction of the test surface. Maximum-likelihood estimation theory and Cramer-Rao lower bounds are introduced and shown to be an effective means of extracting the complex index and surface profile parameters from the measured data and quantitatively assessing the performance. As the design parameters are optimized, the results are shown to improve and approach the theoretical performance limit.

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Eric W. Rogala "Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782E (1 September 1996); https://doi.org/10.1117/12.2298968

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