Quantitative analysis of white light fringes in differential interference microscope

S. Toyooka

doi:10.1117/12.2298984

1 September 1996 Quantitative analysis of white light fringes in differential interference microscope

S. Toyooka

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27782U (1996) https://doi.org/10.1117/12.2298984
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A new method to determine optical pass differences of white light interference fringes based on spectral analysis and subspace method is proposed and applied to analyze an image of a differential interference microscope. Experiments to measure curvature of a bearing bowl well agreed with the value measured by a digital micrometer.

Citation Download Citation

S. Toyooka "Quantitative analysis of white light fringes in differential interference microscope", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782U (1 September 1996); https://doi.org/10.1117/12.2298984

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