Paper
1 September 1996 Lateral shearing interferometry with high accuracy
G. W. R. Leibbrandt
Author Affiliations +
Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778EE (1996) https://doi.org/10.1117/12.2316207
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
A phase-stepped lateral shearing interferometer is presented with the same accuracy as conventional interferometers. This is achieved among others by shearing over a substantial fraction of the wavefront diameter.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. W. R. Leibbrandt "Lateral shearing interferometry with high accuracy", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778EE (1 September 1996); https://doi.org/10.1117/12.2316207
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