Characteristic measurement of surface acoustic wave using a heterodyne interferometer

Suezou Nakadate

doi:10.1117/12.2316209

1 September 1996 Characteristic measurement of surface acoustic wave using a heterodyne interferometer

Suezou Nakadate

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778EG (1996) https://doi.org/10.1117/12.2316209
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A new method for measuring a wavelength and standing wave ratio of a surface acoustic wave(SAW) is presented, which is based on a heterodyne interferometer using first-order diffracted light beams from a SAW device and a grating. Phase and amplitude distributions of a beat signal from the interferometer by moving the substrate or the grating give such characteristics of the SAW. Experimental verifications are presented in two cases of the movements of the object and grating. Two-dimensional measurements around an interdigital transducer of a SAW device are also given.

Citation Download Citation

Suezou Nakadate "Characteristic measurement of surface acoustic wave using a heterodyne interferometer", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778EG (1 September 1996); https://doi.org/10.1117/12.2316209

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