Precise measurement of linear displacement by moire fringes of elongated circular gratings

Jong Sup Song

doi:10.1117/12.2316233

1 September 1996 Precise measurement of linear displacement by moiré fringes of elongated circular gratings

Jong Sup Song

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778F4 (1996) https://doi.org/10.1117/12.2316233
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

Moiré fringes of elongated circular gratings to precisely measure the linear displacements are presented. The moving direction of a grating can be easily determined and the moving displacement can be measured within the accuracy of 1/10 pitch of the grating by using moiré fringes of elongated circular gratings.

Citation Download Citation

Jong Sup Song "Precise measurement of linear displacement by moiré fringes of elongated circular gratings", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778F4 (1 September 1996); https://doi.org/10.1117/12.2316233

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