Micromechanical ultrasonic transducer for liquid nebulization

Roumiana Paneva

doi:10.1117/12.237026

26 April 1996 Micromechanical ultrasonic transducer for liquid nebulization

Roumiana Paneva

Proceedings Volume 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials; (1996) https://doi.org/10.1117/12.237026
Event: 3rd International Conference on Intelligent Materials, 1996, Lyon, France

Abstract

A piezoelectric ZnO layer is used to set thin silicon membrane into vibrations. The possibility to apply this micromechanical structure as an ultrasonic transducer is studied. High vibration modes are characterized with a considerable ultrasonic radiation. The application of the structure for ultrasonic nebulization is discussed.

Citation Download Citation

Roumiana Paneva "Micromechanical ultrasonic transducer for liquid nebulization", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237026

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