High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode

Pawel Drabarek; Michael van Keulen; Goetz Kuehnle; Siegbert Steinlechner

doi:10.1117/12.248489

26 August 1996 High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode

Pawel Drabarek, Michael van Keulen, Goetz Kuehnle, Siegbert Steinlechner

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248489
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

A high-resolution interferometric rotation encoder has been developed and characterized. It is based on the principle of a heterodyne interferometer. The frequency shifting was done by modulation of the injection current of a laser diode and a fiber-optical delay line allowing a compact system design. Light wave aberrations produced by the scale (i.e. rotary grating disk) are pre-corrected by using computer-generated holograms (CGH). Combined analogue and digital signal processing allow high resolution as well as high measurement rates. The designed prototype yields a resolution of 0.03 arcsec (i.e. 25 bit) corresponding to 3 nm resolution of displacement of the 38 mm diameter disk-scale. The measuring rate of 1 MHz allows a rotation speed resolution of 0.013 rpm at a maximum speed of 300 rpm.

Citation Download Citation

Pawel Drabarek, Michael van Keulen, Goetz Kuehnle, and Siegbert Steinlechner "High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248489

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available