Role of sampling errors in the specification of x-ray mirror surfaces

Eugene L. Church; Peter Z. Takacs

doi:10.1117/12.245081

19 July 1996 Role of sampling errors in the specification of x-ray mirror surfaces

Eugene L. Church, Peter Z. Takacs

Proceedings Volume 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III; (1996) https://doi.org/10.1117/12.245081
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

The effects of topographic finish errors on the quality of the image formed by a simple focusing mirror and the performance of different laboratory roughness-measuring instruments can be described in terms of a common formalism involving statistical operators or 'estimators'. In effect, conventional finish specifications and the test measurements used to ensure compliance with them, are stated in terms of the average values of these estimators. Int his paper we calculate correction factors to be applied to such average- based specifications and test measurements to account for the fluctuation effects inherent in the statistical nature of the processes considered.

Citation Download Citation

Eugene L. Church and Peter Z. Takacs "Role of sampling errors in the specification of x-ray mirror surfaces", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); https://doi.org/10.1117/12.245081

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