Paper
31 December 1996 Statistical theory on holographic and speckle metrology
Qiang Fang, Jiabi Chen
Author Affiliations +
Proceedings Volume 2866, International Conference on Holography and Optical Information Processing (ICHOIP '96); (1996) https://doi.org/10.1117/12.263096
Event: International Conference on Holography and Optical Information Processing, 1996, Nanjing, China
Abstract
In this paper, the basic view points and methods of statistical metrological theory to holographic and speckle metrology are reviewed. As an example, the statistical theory is applied to quasi-heterodyne holographic interferometry. The results reveal the relation between fringe distribution and system parameters and the relation between measuring accuracy and system errors. From this example, it can be found that statistical metrological theory is superior that the conventional geometrical theory.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiang Fang and Jiabi Chen "Statistical theory on holographic and speckle metrology", Proc. SPIE 2866, International Conference on Holography and Optical Information Processing (ICHOIP '96), (31 December 1996); https://doi.org/10.1117/12.263096
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KEYWORDS
Metrology

Wavefronts

Holography

Speckle

Holographic interferometry

Speckle metrology

Interferometry

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